JPH069013Y2 - 真空蒸着装置 - Google Patents
真空蒸着装置Info
- Publication number
- JPH069013Y2 JPH069013Y2 JP7480289U JP7480289U JPH069013Y2 JP H069013 Y2 JPH069013 Y2 JP H069013Y2 JP 7480289 U JP7480289 U JP 7480289U JP 7480289 U JP7480289 U JP 7480289U JP H069013 Y2 JPH069013 Y2 JP H069013Y2
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- film thickness
- substrate holder
- evaporation
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001771 vacuum deposition Methods 0.000 title 1
- 238000007740 vapor deposition Methods 0.000 claims description 60
- 239000000758 substrate Substances 0.000 claims description 36
- 238000001704 evaporation Methods 0.000 claims description 16
- 230000008020 evaporation Effects 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 16
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 description 7
- 239000000428 dust Substances 0.000 description 4
- 238000005192 partition Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 230000002000 scavenging effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000011364 vaporized material Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7480289U JPH069013Y2 (ja) | 1989-06-26 | 1989-06-26 | 真空蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7480289U JPH069013Y2 (ja) | 1989-06-26 | 1989-06-26 | 真空蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0314146U JPH0314146U (en]) | 1991-02-13 |
| JPH069013Y2 true JPH069013Y2 (ja) | 1994-03-09 |
Family
ID=31614816
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7480289U Expired - Lifetime JPH069013Y2 (ja) | 1989-06-26 | 1989-06-26 | 真空蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069013Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006312765A (ja) * | 2005-05-09 | 2006-11-16 | Fujinon Sano Kk | 真空蒸着装置 |
-
1989
- 1989-06-26 JP JP7480289U patent/JPH069013Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0314146U (en]) | 1991-02-13 |
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